ASML's lithography systems are central to the process of making microchips.

Scaling up in the semiconductor industry

The semiconductor industry is driven by affordable scale, enabled by ASML's holistic lithography product portfolio

Microchips are made by building complex patterns of transistors layer by layer on a silicon wafer. ASML's lithography systems are central to that process.
A lithography system (formally known as 'photolithography') is essentially a projection system. Light is projected through a blueprint of the pattern being printed (also called a 'mask' or 'reticle').

As the pattern is encoded in the light, the system's optics shrink and focus the pattern on a light-sensitive silicon wafer. After the pattern is printed, the system moves the wafer slightly and makes a new copy on the wafer.


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